Silicon carbide (SiC) furnace lamp

Tue, 23 Jun 2026 13:43:23 +0800

On the line, a photoresist bake is a thermal sprint. You’re chasing ±0.1°C, because drift erases overlay margin and turns wafers into scrap. When the lamp underperforms, you pay for it—rework, scrap, and unplanned downtime. So we built the SiC furnace lamp to run shift after shift with repeatable heat. The core is a short-wave infrared emitter: Silicon carbide in a quartz envelope, tuned for fast, stable response. We target wafer-level uniformity of ±0.1°C across the bake zone, and lot-to-lot repeatability holds within ±0.5°C. Output is adjustable for both soft bake and hard bake recipes, with ramp control that keeps your thermal budget tight. The package is cleanroom-compatible, engineered for Class 1–100 environments and zero particle generation. No outgassing to contaminate photoresist. We’ve seen units run 5,000+ hours with less than 5% output drop, built for 24/7 operation. In the lithography bay, this lamp swaps in for legacy halogen and medium-wave systems—no recipe rewrite. You get faster stabilization, fewer bake excursions, and lower energy per wafer. It drops into standard furnace fixtures, matches international semiconductor equipment interfaces, and delivers a verified, equivalent thermal profile for immediate qualification. Installation comes down to the basics: fixture alignment and coolant flow. Mismatched reflectors or insufficient cooling will distort the profile. Verify chamber geometry and power feed before you light it up. Once matched, it behaves as a straight drop-in thermal source—precision, exactly where you need it.

Silicon on Warm IR Spot Heating

Silicon carbide (SiC) furnace lamp